計算概要 -Computation Summary-
プロセスプラズマを用いた成膜手法のひとつである、DCマグネトロンスパッタの解析事例です。 Particle-PLUSは真空チャンバ内のプラズマ解析を得意としており、高速に成膜速度などのシミュレーションを行うことができます。
項目・・・
a.『モデル概要』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i54dc76181da72490/version/1692848711/image.png)
b.『cf.マグネトロンスパッタの物理』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i889bb3de026d3826/version/1692849037/image.png)
c.『中性ガス密度』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/ifc38d1799f58656c/version/1692849598/image.png)
d.『静磁場』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/iaa1536a7689dae8e/version/1692858600/image.png)
e.『プラズマ密度①』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i277e6ba8d17d5c41/version/1692857181/image.png)
f.『プラズマ密度②』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i2a2dfcfbbf3de7bf/version/1692857601/image.png)
g.『電位と電場①』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i363d7d20388db3a0/version/1692858509/image.png)
h.『電位と電場②』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/idf4a52fa39b91db1/version/1692859139/image.png)
i.『電子流速』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i4b743dc38548ef9c/version/1692859984/image.png)
j.『イオン流速』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i8bc41be91a228502/version/1692860439/image.png)
k.『プラズマの温度*』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i2879d9e038fab9b6/version/1692861230/image.png)
l.『プラズマのエネルギー』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i5c207b56e3c6aa0b/version/1693188215/image.png)
m.『表面入射エネルギー』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i64d9787d23e3eb0e/version/1693188791/image.png)
n.『表面入射イオンの頻度分布』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/ibf92cf7136d78e7e/version/1693189877/image.png)
o.『Tiのエロ―ジョンと数密度』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i0f5b70de72f41eda/version/1693190725/image.png)
o.『Tiデポジションレート』
![](https://image.jimcdn.com/app/cms/image/transf/dimension=734x10000:format=png/path/sf4bb499a504a0024/image/i47d1967b3eb81b5b/version/1693191768/image.png)
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